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Start Over Graduate Program Materials Science and Engineering Keyword MEMS

1. Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

open_access
Open Access
Author:
Hong, Eunki
Title:
Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film
Graduate Program:
Materials Science and Engineering
Keywords:
surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT
File:
Download etd.pdf
Committee Members:
Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member

2. Local Origin of Macroscopic Properties and Patterning in PbZr(1-x)Ti(x)O(3) Films

open_access
Open Access
Author:
Bintachitt, Patamas
Title:
Local Origin of Macroscopic Properties and Patterning in PbZr(1-x)Ti(x)O(3) Films
Graduate Program:
Materials Science and Engineering
Keywords:
Ferroelectrics
Piezoelectric
Thin Films
Piezoelectric Force Microscopy (PFM)
MEMS
Lead Zirconate Titanate PZT
File:
Download PhD_thesis_patamas_bintachitt.pdf
Committee Members:
Prof Susan Trolier Mc Kinstry, Dissertation Advisor/Co-Advisor
Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Thomas R Shrout, Committee Member
Christopher Muhlstein, Committee Member
Thomas Nelson Jackson, Committee Member

4. The Development and Modeling of a Simulated Test Structure for Rapidly Testing Microelectromechanical Switch Contacts

open_access
Open Access
Author:
Domask, Anna Catherine
Title:
The Development and Modeling of a Simulated Test Structure for Rapidly Testing Microelectromechanical Switch Contacts
Graduate Program:
Materials Science and Engineering
Keywords:
MEMS
Switch
Modeling
Materials
Contacts
Testing
FEA
bending
File:
Download DomaskMastersThesisFinal.pdf
Committee Members:
Suzanne E Mohney, Thesis Advisor/Co-Advisor
Christopher Muhlstein, Thesis Advisor/Co-Advisor

5. Effects of Nanoscale Coatings on Reliability of MEMS Ohmic Contact Switches

open_access
Open Access
Author:
Tremper, Amber Leigh
Title:
Effects of Nanoscale Coatings on Reliability of MEMS Ohmic Contact Switches
Graduate Program:
Materials Science and Engineering
Keywords:
MEMS
ohmic
thin films
nanoindentation
coatings
ruthenium
gold
platinum
contact resistance
File:
Download Tremper_Doctoral_Thesis_final.pdf
Committee Members:
Suzanne E Mohney, Dissertation Advisor/Co-Advisor
Dr Christopher Muhlstein, Dissertation Advisor/Co-Advisor
Paul Raymond Howell, Committee Member
Seong Han Kim, Committee Member
Albert Eliot Segall, Committee Member