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Author:
Bittel, Brad
Title:
STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN
BACK END OF LINE DIELECTRICS
AND SIC MOSFETS
Graduate Program:
Materials Science and Engineering
Keywords:
magnetic resonance EPR low-k BEOL SiC
File:
Download thesis_after_defense.pdf
Committee Members:
Patrick M Lenahan, Dissertation Advisor/Co-Advisor Patrick M Lenahan, Committee Chair/Co-Chair Suman Datta, Committee Member Joan Marie Redwing, Committee Member Jerzy Ruzyllo, Committee Member
Author:
Follman, Jacob Jay
Title:
On the atomic scale defects involved in the negative bias temperature instability in 4H-SiC MOSFETs
Graduate Program:
Materials Science and Engineering
Keywords:
NBTI SiC MOSFET EPR EDMR
File:
Download Follman_J_MS_Thesis.pdf
Committee Members:
Patrick M Lenahan, Thesis Advisor/Co-Advisor