1. SYNTHESIS AND CHARACTERIZATION OF TWO-DIMENSIONAL MATERIALS FOR BEYOND COMPLEMENTARY METAL OXIDE SEMICONDUCTOR TECHNOLOGY Open Access Author: Zhao, Rui Title: SYNTHESIS AND CHARACTERIZATION OF TWO-DIMENSIONAL MATERIALS FOR BEYOND COMPLEMENTARY METAL OXIDE SEMICONDUCTOR TECHNOLOGY Graduate Program: Materials Science and Engineering Keywords: TMDS: 1T-TaS2; MoS2phase-FETcopper diffusion barrierbeyond CMOSnanomaterials File: Download Dissertation_Rui_Zhao_August_2019.pdf Committee Members: Joshua A. Robinson, Dissertation Advisor/Co-AdvisorSuzanne Mohney, Committee Chair/Co-ChairMauricio Terrones, Committee MemberRoman-Engel Herbert, Committee MemberSaptarshi Das, Outside Member