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Author:

Bittel, Brad

Title:

STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS

Graduate Program:

Materials Science and Engineering

Keywords:

magnetic resonance
EPR
low-k
BEOL
SiC

File:

Download thesis_after_defense.pdf

Committee Members:

Patrick M Lenahan, Dissertation Advisor/Co-Advisor
Patrick M Lenahan, Committee Chair/Co-Chair
Suman Datta, Committee Member
Joan Marie Redwing, Committee Member
Jerzy Ruzyllo, Committee Member

Author:

Pomorski, Thomas Anthony

Title:

defect structure and electronic transport in low-k films used for back end of line dielectrics

Graduate Program:

Materials Science and Engineering

Keywords:

electronic materials
EPR
low-k
back end of line

File:

Download Pomorski_thesis_final_submission_edits.pdf

Committee Members:

Patrick M Lenahan, Thesis Advisor/Co-Advisor
S Ashok, Thesis Advisor/Co-Advisor
Jerzy Ruzyllo, Thesis Advisor/Co-Advisor
Suzanne E Mohney, Thesis Advisor/Co-Advisor

Author:

Khawaji, Ibrahim Hussain

Title:

ENGINEERED THIN FILMS OF PARYLENE C AS ELECTRICAL INSULATORS FOR FLEXIBLE ELECTRONICS

Graduate Program:

Electrical Engineering

Keywords:

ENGINEERED THIN FILMS
PARYLENE C
ELECTRICAL INSULATORS
FLEXIBLE ELECTRONICS
low-k

File:

Download Khawaji_Dissertation_19.pdf

Committee Members:

Osama O Awadelkarim, Dissertation Advisor/Co-Advisor
Jerzy Ruzyllo, Committee Chair/Co-Chair
Akhlesh Lakhtakia, Committee Member
Noel Christopher Giebink, Committee Member
John B Asbury, Outside Member