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Start Over Graduate Program Materials Science and Engineering Year 2011 Keyword co-sputtering Author Last Name Ozcelik

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Author:: Ozcelik, Adem
Title:: VANADIUM-TRANSITION METAL OXIDE ALLOY THIN FILMS FOR MICROBOLOMETER APPLICATIONS
Graduate Program:: Materials Science and Engineering
Keywords:: ALD
co-sputtering
sputtering
thin films
Vanadium oxide
microbolometer
Atomic Layer Deposition
VTIP
Alloying of vanadium oxide
File:: Download Adem_Ozcelik_MS_MATSE.pdf
Committee Members:: David Lawrence Allara, Thesis Advisor/Co-Advisor
David Lawrence Allara, Thesis Advisor/Co-Advisor

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