1. Atomic-Scale Defects Involved in the Negative Bias Temperature Instability in SiO2 and Plasma-Nitrided Oxide Based pMOSFETs Open Access Author: Campbell, Jason P Title: Atomic-Scale Defects Involved in the Negative Bias Temperature Instability in SiO2 and Plasma-Nitrided Oxide Based pMOSFETs Graduate Program: Engineering Science and Mechanics Keywords: Negative Bias Temperature InstabilitySpin-Dependent RecombinationSpin-Dependent TunnelingAtomic-Scale DefectsReliability File: Download Campbell_PhDThesis_Final.pdf Committee Members: Patrick M Lenahan, Committee Chair/Co-ChairS Ashok, Committee MemberJerzy Ruzyllo, Committee MemberMichael T Lanagan, Committee MemberTara Krishnan, Committee Member
