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Author:

Sharov, Fedor

Title:

Applications of Electrically Detected Magnetic Resonance to the Analysis of Technologically Relevant Reliability Mechanisms in Semiconductor Devices

Graduate Program:

Engineering Science and Mechanics (PHD)

Keywords:

Electrically Detected Magnetic Resonance
Near-Zero-Field Magnetoresistance
Reliability
Metal-Oxide-Semiconductors
Field Effect Transistors
Time Dependent Dielectric Breakdown
Gamma Irradiation
Total Ionizing Dose
Silicon Dioxide
Silicon Carbide
Rapid Scan
Interface Defects

File:

Download Thesis_FVS_Final_jcm6606_2.pdf

Committee Members:

Albert Segall, Program Head/Chair
Sahin Ozdemir, Major Field Member
Suzanne Mohney, Outside Unit & Field Member
Patrick Lenahan, Chair & Dissertation Advisor
Saptarshi Das, Major Field Member