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Start Over Degree MS Keyword ALD Keyword VTIP Keyword thin films

1. VANADIUM-TRANSITION METAL OXIDE ALLOY THIN FILMS FOR MICROBOLOMETER APPLICATIONS

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Open Access
Author:
Ozcelik, Adem
Title:
VANADIUM-TRANSITION METAL OXIDE ALLOY THIN FILMS FOR MICROBOLOMETER APPLICATIONS
Graduate Program:
Materials Science and Engineering
Keywords:
ALD
co-sputtering
sputtering
thin films
Vanadium oxide
microbolometer
Atomic Layer Deposition
VTIP
Alloying of vanadium oxide
File:
Download Adem_Ozcelik_MS_MATSE.pdf
Committee Members:
David Lawrence Allara, Thesis Advisor/Co-Advisor
David Lawrence Allara, Thesis Advisor/Co-Advisor