1. Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications Open Access Author: Li, Yuanyuan Title: Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications Graduate Program: Electrical Engineering Keywords: ZnO thin film transistorsPlasma enhanced atomic layer depositionhybrid CMOSlow-voltage operation circuitstri-layer TFTs File: Download Yuanyuan_Li_--_PEALD_ZnO_TFTs_for_large_area_electronics_applications_-_eTD_-_2-_higher_dif.pdf Committee Members: Thomas Nelson Jackson, Dissertation Advisor/Co-AdvisorThomas Nelson Jackson, Committee Chair/Co-ChairSuman Datta, Committee MemberJerzy Ruzyllo, Committee MemberMark William Horn, Committee Member
