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Start Over Committee Member Jerzy Ruzyllo Committee Member Mark William Horn Committee Member Thomas Nelson Jackson

1. PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS

open_access
Open Access
Author:
Sun, Jie
Title:
PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS
Graduate Program:
Electrical Engineering
Keywords:
Plasma Enhanced Atomic Layer Deposition
Atomic Layer Deposition
Plasma Enhanced Chemical Vapor Depostion
Thin Film Transistors (TFTs)
Zinc Oxide (ZnO)
ZnO TFTs Circuits
File:
Download Final0729.pdf
Committee Members:
Thomas Nelson Jackson, Committee Chair/Co-Chair
Jerzy Ruzyllo, Committee Member
Joan Marie Redwing, Committee Member
Mark William Horn, Committee Member

2. Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications

open_access
Open Access
Author:
Li, Yuanyuan
Title:
Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications
Graduate Program:
Electrical Engineering
Keywords:
ZnO thin film transistors
Plasma enhanced atomic layer deposition
hybrid CMOS
low-voltage operation circuits
tri-layer TFTs
File:
Download Yuanyuan_Li_--_PEALD_ZnO_TFTs_for_large_area_electronics_applications_-_eTD_-_2-_higher_dif.pdf
Committee Members:
Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Suman Datta, Committee Member
Jerzy Ruzyllo, Committee Member
Mark William Horn, Committee Member