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Start Over Committee Member Allison Michelle Beese Keyword X-ray diffraction (XRD) Keyword air oxidation Keyword corrosion resistance Keyword energy dispersive spectroscopy (EDS) Keyword nitrogen partial pressure Keyword oxidation resistance Keyword scanning electron microscopy (SEM) Keyword scanning electron microscopy (SEM) Keyword scratch testing Keyword substrate bias Keyword substrate surface roughness Keyword titanium aluminum nitride (TiAlN)