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Start Over Graduate Program Electrical Engineering Year 2013 Author Last Name Li

2. Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications

open_access
Open Access
Author:
Li, Yuanyuan
Title:
Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications
Graduate Program:
Electrical Engineering
Keywords:
ZnO thin film transistors
Plasma enhanced atomic layer deposition
hybrid CMOS
low-voltage operation circuits
tri-layer TFTs
File:
Download Yuanyuan_Li_--_PEALD_ZnO_TFTs_for_large_area_electronics_applications_-_eTD_-_2-_higher_dif.pdf
Committee Members:
Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Suman Datta, Committee Member
Jerzy Ruzyllo, Committee Member
Mark William Horn, Committee Member