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1. Effects of Processing Conditions on Vanadium Oxide Films Deposited via Pulsed DC Sputtering

open_access

Open Access

Author:: Fieldhouse, Nicholas M.
Title:: Effects of Processing Conditions on Vanadium Oxide Films Deposited via Pulsed DC Sputtering
Graduate Program:: Engineering Science
Keywords:: microbolometers
vanadium
oxide
thin film
sputtering
File:: Download ms_thesis.pdf
Committee Members:: Mark William Horn, Thesis Advisor/Co-Advisor
Mark William Horn, Thesis Advisor/Co-Advisor