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Author:

Lettieri, James

Title:

Critical Issues of Complex, Epitaxial Oxide Growth and Integration with Silicon by Molecular Beam Epitaxy

Graduate Program:

Materials

Keywords:

oxides
silicon
molecular beam epitaxy

File:

Download Lettierithesis.pdf

Committee Members:

Xiaoxing Xi, Committee Member
Venkatraman Gopalan, Committee Member
Thomas E Mallouk, Committee Member
Darrell Schlom, Committee Chair/Co-Chair