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Start Over Keyword ion beam etching Keyword ion beam etching Author Last Name Gross

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Author:: Gross, Steven Joseph
Title:: MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)
Graduate Program:: Electrical Engineering
Keywords:: MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph
File:: Download SJG-Thesis.pdf
Committee Members:: Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member

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