1. PLASMA-ENHANCED ATOMIC LAYER DEPOSITION ZINC OIXDE FLEXIBLE THIN FILM ELECTRONICS Open Access Author: Zhao, Dalong Title: PLASMA-ENHANCED ATOMIC LAYER DEPOSITION ZINC OIXDE FLEXIBLE THIN FILM ELECTRONICS Graduate Program: Electrical Engineering Keywords: Oxide semiconductorplasma-enhanced atomic layer depositionthin film transistorflexible electronics File: Download Thesis-final-ETD.pdf Committee Members: Thomas Nelson Jackson, Dissertation Advisor/Co-AdvisorThomas Nelson Jackson, Committee Chair/Co-ChairSrinivas A Tadigadapa, Committee MemberSuman Datta, Committee MemberMark William Horn, Committee Member