Search

Author:

Bittel, Brad

Title:

STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS

Graduate Program:

Materials Science and Engineering

Keywords:

magnetic resonance
EPR
low-k
BEOL
SiC

File:

Download thesis_after_defense.pdf

Committee Members:

Patrick M Lenahan, Dissertation Advisor/Co-Advisor
Patrick M Lenahan, Committee Chair/Co-Chair
Suman Datta, Committee Member
Joan Marie Redwing, Committee Member
Jerzy Ruzyllo, Committee Member

Author:

Follman, Jacob Jay

Title:

On the atomic scale defects involved in the negative bias temperature instability in 4H-SiC MOSFETs

Graduate Program:

Materials Science and Engineering

Keywords:

NBTI
SiC
MOSFET
EPR
EDMR

File:

Download Follman_J_MS_Thesis.pdf

Committee Members:

Patrick M Lenahan, Thesis Advisor/Co-Advisor

Author:

Pomorski, Thomas Anthony

Title:

defect structure and electronic transport in low-k films used for back end of line dielectrics

Graduate Program:

Materials Science and Engineering

Keywords:

electronic materials
EPR
low-k
back end of line

File:

Download Pomorski_thesis_final_submission_edits.pdf

Committee Members:

Patrick M Lenahan, Thesis Advisor/Co-Advisor
S Ashok, Thesis Advisor/Co-Advisor
Jerzy Ruzyllo, Thesis Advisor/Co-Advisor
Suzanne E Mohney, Thesis Advisor/Co-Advisor

Author:

Maier, Russell Alan

Title:

Dynamics of Oxygen Vacancies and Defect Complexes in the Perovskite Oxide Structure

Graduate Program:

Materials Science and Engineering

Keywords:

oxygen vacancy
EPR
impedance
defect complex
ionic conductivity

File:

Download Russell_Maier_Dissertation.pdf

Committee Members:

Clive A Randall, Dissertation Advisor/Co-Advisor
Susan�Trolier�McKinstry, Committee Chair/Co-Chair
Patrick M Lenahan, Committee Member
Shujun Zhang, Committee Member
Long Qing Chen, Committee Member