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Author:

Bittel, Brad

Title:

STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS

Graduate Program:

Materials Science and Engineering

Keywords:

magnetic resonance
EPR
low-k
BEOL
SiC

File:

Download thesis_after_defense.pdf

Committee Members:

Patrick M Lenahan, Dissertation Advisor/Co-Advisor
Patrick M Lenahan, Committee Chair/Co-Chair
Suman Datta, Committee Member
Joan Marie Redwing, Committee Member
Jerzy Ruzyllo, Committee Member

Author:

Follman, Jacob Jay

Title:

On the atomic scale defects involved in the negative bias temperature instability in 4H-SiC MOSFETs

Graduate Program:

Materials Science and Engineering

Keywords:

NBTI
SiC
MOSFET
EPR
EDMR

File:

Download Follman_J_MS_Thesis.pdf

Committee Members:

Patrick M Lenahan, Thesis Advisor/Co-Advisor

Author:

Barker, William

Title:

Detection of Defects in Silicon Carbide PIN Diodes via Electrically Detected Magnetic Resonance

Graduate Program:

Engineering Science and Mechanics

Keywords:

Silicon Carbide
Electrically Detected Magnetic Resonance
PIN Diodes
EDMR
EPR
Electron Paramagnetic Resonance
SiC

File:

Download Barker2020_MSThesis.pdf

Committee Members:

Patrick M Lenahan, Thesis Advisor/Co-Advisor
Judith Todd Copley, Program Head/Chair
Mark William Horn, Committee Member
Michael T Lanagan, Committee Member