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1. Critical Issues of Complex, Epitaxial Oxide Growth and Integration with Silicon by Molecular Beam Epitaxy

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Open Access

Author:: Lettieri, James
Title:: Critical Issues of Complex, Epitaxial Oxide Growth and Integration with Silicon by Molecular Beam Epitaxy
Graduate Program:: Materials
Keywords:: oxides
silicon
molecular beam epitaxy
File:: Download Lettierithesis.pdf
Committee Members:: Xiaoxing Xi, Committee Member
Venkatraman Gopalan, Committee Member
Thomas E Mallouk, Committee Member
Darrell Schlom, Committee Chair/Co-Chair