Search

Author:

Li, Handong

Title:

Nano-structured PECVD Silicon Films and Their Device Applications

Graduate Program:

Engineering Science and Mechanics

Keywords:

poly-crystalline silicon
thin film transistor
nano-crystalline silicon
humidity sensor

File:

Download etd.pdf

Committee Members:

Stephen Joseph Fonash, Committee Chair/Co-Chair
Russell Messier, Committee Member
Jian Xu, Committee Member
Mark William Horn, Committee Member
Jerzy Ruzyllo, Committee Member
Judith Todd Copley, Committee Member