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Author:

Li, Yuanyuan

Title:

Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications

Graduate Program:

Electrical Engineering

Keywords:

ZnO thin film transistors
Plasma enhanced atomic layer deposition
hybrid CMOS
low-voltage operation circuits
tri-layer TFTs

File:

Download Yuanyuan_Li_--_PEALD_ZnO_TFTs_for_large_area_electronics_applications_-_eTD_-_2-_higher_dif.pdf

Committee Members:

Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Suman Datta, Committee Member
Jerzy Ruzyllo, Committee Member
Mark William Horn, Committee Member