eTD Explore

Start Over Graduate Program Materials Science and Engineering Degree MS Keyword Atomic Layer Deposition

Open Access

Author:: Ozcelik, Adem
Title:: VANADIUM-TRANSITION METAL OXIDE ALLOY THIN FILMS FOR MICROBOLOMETER APPLICATIONS
Graduate Program:: Materials Science and Engineering
Keywords:: ALD
co-sputtering
sputtering
thin films
Vanadium oxide
microbolometer
Atomic Layer Deposition
VTIP
Alloying of vanadium oxide
File:: Download Adem_Ozcelik_MS_MATSE.pdf
Committee Members:: David Lawrence Allara, Thesis Advisor/Co-Advisor
David Lawrence Allara, Thesis Advisor/Co-Advisor

Search