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Author:

Sun, Jie

Title:

PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS

Graduate Program:

Electrical Engineering

Keywords:

Plasma Enhanced Atomic Layer Deposition
Atomic Layer Deposition
Plasma Enhanced Chemical Vapor Depostion
Thin Film Transistors (TFTs)
Zinc Oxide (ZnO)
ZnO TFTs Circuits

File:

Download Final0729.pdf

Committee Members:

Thomas Nelson Jackson, Committee Chair/Co-Chair
Jerzy Ruzyllo, Committee Member
Joan Marie Redwing, Committee Member
Mark William Horn, Committee Member

Author:

Sun, Kaige

Title:

Double-Gate, Tri-Layer, and Vertical ZnO TFTs and Circuits

Graduate Program:

Electrical Engineering

Keywords:

double-gate TFT
tri-layer TFT
vertical TFT
zinc oxide
circuits
modeling
PEALD
digital and analog circuits
rectifier

File:

Download Dissertation_Kaige_Sun.pdf

Committee Members:

Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Suman Datta, Committee Member
Noel Christopher Giebink, Committee Member
Kyusun Choi, Committee Member