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Start Over Degree PHD Committee Member Thomas Nelson Jackson Committee Member Suman Datta Keyword Plasma enhanced atomic layer deposition Author Last Name Li

1. Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications

open_access
Open Access
Author:
Li, Yuanyuan
Title:
Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications
Graduate Program:
Electrical Engineering
Keywords:
ZnO thin film transistors
Plasma enhanced atomic layer deposition
hybrid CMOS
low-voltage operation circuits
tri-layer TFTs
File:
Download Yuanyuan_Li_--_PEALD_ZnO_TFTs_for_large_area_electronics_applications_-_eTD_-_2-_higher_dif.pdf
Committee Members:
Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Suman Datta, Committee Member
Jerzy Ruzyllo, Committee Member
Mark William Horn, Committee Member

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