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Author:

Hong, Eunki

Title:

Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

Graduate Program:

Materials Science and Engineering

Keywords:

surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT

File:

Download etd.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member

Author:

Bintachitt, Patamas

Title:

Local Origin of Macroscopic Properties and Patterning in PbZr(1-x)Ti(x)O(3) Films

Graduate Program:

Materials Science and Engineering

Keywords:

Ferroelectrics
Piezoelectric
Thin Films
Piezoelectric Force Microscopy (PFM)
MEMS
Lead Zirconate Titanate PZT

File:

Download PhD_thesis_patamas_bintachitt.pdf

Committee Members:

Prof Susan Trolier Mc Kinstry, Dissertation Advisor/Co-Advisor
Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Thomas R Shrout, Committee Member
Christopher Muhlstein, Committee Member
Thomas Nelson Jackson, Committee Member

Author:

Gross, Steven Joseph

Title:

MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)

Graduate Program:

Electrical Engineering

Keywords:

MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph

File:

Download SJG-Thesis.pdf

Committee Members:

Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member