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Author:

Zhao, Dalong

Title:

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION ZINC OIXDE FLEXIBLE THIN FILM ELECTRONICS

Graduate Program:

Electrical Engineering

Keywords:

Oxide semiconductor
plasma-enhanced atomic layer deposition
thin film transistor
flexible electronics

File:

Download Thesis-final-ETD.pdf

Committee Members:

Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Member
Suman Datta, Committee Member
Mark William Horn, Committee Member