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Author:

Hong, Eunki

Title:

Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

Graduate Program:

Materials Science and Engineering

Keywords:

surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT

File:

Download etd.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member

Author:

Polcawich, Ronald Gene

Title:

DESIGN, FABRICATION, TEST, AND EVALUATION OF RF MEMS SERIES SWITCHES USING LEAD ZIRCONATE TITANATE (PZT) THIN FILM ACTUATORS

Graduate Program:

Materials Science and Engineering

Keywords:

PZT
RF MEMS
Switch

File:

Download Thesis_PZT_RF_MEMS_Switch_RPolcawich_2007_07_19_final.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
Thomas R Shrout, Committee Member
Madan Dubey, Committee Member