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Author:

Jin, Yao

Title:

REACTIVE SPUTTER DEPOSITION OF VANADIUM, NICKEL, AND MOLYBDENUM OXIDE THIN FILMS FOR USE IN UNCOOLED INFRARED IMAGING

Graduate Program:

Engineering Science

Keywords:

uncooled infrared imaging
microbolometer
vanadium oxide
nickel oxide
molybdenum oxide
reactive sputtering deposition

File:

Download Yao_Jin_Thesis_Final.pdf

Committee Members:

Mark William Horn, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Member
S Ashok, Committee Member
Michael T Lanagan, Committee Member
Mark William Horn, Committee Chair/Co-Chair