eTD Explore

Start Over Year 2016 Committee Member Michael Anthony Hickner Committee Member Michael T Lanagan Committee Member Susan E Trolier Mckinstry

Open Access

Author:: Welsh, Aaron Joel
Title:: damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing
Graduate Program:: Materials Science and Engineering
Keywords:: soft lithography
thin films
dry etching
piezoresponse force microscopy
electroceramics
piezoelectrics
ferroelectrics
File:: Download Aaron_J_Welsh_PhD_Thesis_Final.pdf
Committee Members:: Susan E Trolier Mckinstry, Dissertation Advisor/Co-Advisor
Clive A Randall, Committee Member
Michael T Lanagan, Committee Member
Michael Anthony Hickner, Committee Member

Search