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Author:

Vanli, Omer Arda

Title:

Statistical Process Adjustment Problems in Short-Run Manufacturing

Graduate Program:

Industrial Engineering

Keywords:

Statistical Process Control
System Identification
Time Series Analysis
Robust Parameter Design
Semiconductor Manufacturing
Run-to-run Control

File:

Download thesis_oav.pdf

Committee Members:

Enrique Del Castillo, Committee Chair/Co-Chair
M Jeya Chandra, Committee Member
Tao Yao, Committee Member
Murali Haran, Committee Member
Nital S Patel, Committee Member