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Author:

Acord, Jeremy Daniel

Title:

IN SITU STRESS MEASUREMENTS DURING MOCVD GROWTH OF ALUMINUM GALLIUM NITRIDE ON SILICON CARBIDE

Graduate Program:

Materials Science and Engineering

Keywords:

METAL ORGANIC CHEMICAL VAPOR DEPOSITION
III-V NITRIDES
STRESS MEASUREMENT
EPITAXY

File:

Download JD_Acord_Ph._D._Thesis_August_2007.pdf

Committee Members:

Joan Marie Redwing, Committee Chair/Co-Chair
Elizabeth C Dickey, Committee Member
Christopher L Muhlstein, Committee Member
Mark William Horn, Committee Member