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Author:

Bittel, Brad

Title:

STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS

Graduate Program:

Materials Science and Engineering

Keywords:

magnetic resonance
EPR
low-k
BEOL
SiC

File:

Download thesis_after_defense.pdf

Committee Members:

Patrick M Lenahan, Dissertation Advisor/Co-Advisor
Patrick M Lenahan, Committee Chair/Co-Chair
Suman Datta, Committee Member
Joan Marie Redwing, Committee Member
Jerzy Ruzyllo, Committee Member

Author:

Ryan, Jason Thomas

Title:

Magnetic Resonance Observations of Defects Involved in Bias Temperature Instabilities and Stress Induced Leakage Currents in HfO2 and SiO2 Based Metal-Oxide-Silicon Structures

Graduate Program:

Materials Science and Engineering

Keywords:

stress induced leakage current
negative bias temperature instabilitiy
electron spin resonance
spin dependent tunneling
magnetic resonance

File:

Download Thesis_V4_Final.pdf

Committee Members:

Patrick M Lenahan, Dissertation Advisor/Co-Advisor
Patrick M Lenahan, Committee Chair/Co-Chair
Suzanne E Mohney, Committee Member
Jerzy Ruzyllo, Committee Member
Suman Datta, Committee Member