Search

Author:

Bittel, Brad

Title:

STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS

Graduate Program:

Materials Science and Engineering

Keywords:

magnetic resonance
EPR
low-k
BEOL
SiC

File:

Download thesis_after_defense.pdf

Committee Members:

Patrick M Lenahan, Dissertation Advisor/Co-Advisor
Patrick M Lenahan, Committee Chair/Co-Chair
Suman Datta, Committee Member
Joan Marie Redwing, Committee Member
Jerzy Ruzyllo, Committee Member

Author:

Pomorski, Thomas Anthony

Title:

defect structure and electronic transport in low-k films used for back end of line dielectrics

Graduate Program:

Materials Science and Engineering

Keywords:

electronic materials
EPR
low-k
back end of line

File:

Download Pomorski_thesis_final_submission_edits.pdf

Committee Members:

Patrick M Lenahan, Thesis Advisor/Co-Advisor
S Ashok, Thesis Advisor/Co-Advisor
Jerzy Ruzyllo, Thesis Advisor/Co-Advisor
Suzanne E Mohney, Thesis Advisor/Co-Advisor