1. MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT) Open Access Author: Gross, Steven Joseph Title: MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT) Graduate Program: Electrical Engineering Keywords: MEMSPZTmicrofabricationetchingcantileversxenon difluorideion beam etchingpiezoelectricactuatorsunimorphbimorph File: Download SJG-Thesis.pdf Committee Members: Thomas Nelson Jackson, Committee Chair/Co-ChairSrinivas A Tadigadapa, Committee Chair/Co-ChairSusan E Trolier Mckinstry, Committee MemberKenji Uchino, Committee MemberChristopher Rahn, Committee Member
2. DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS Open Access Author: Zhang, Zheqian Title: DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS Graduate Program: Mechanical Engineering Keywords: multifunctional transducersPZTpiezoelectricMEMS File: Download DESIGN_FABRICATION_AND_CHARACTERIZATION_OF_MICROMACHINED_PIEZOELECTRIC_T-BEAM_TRANSDUCERS.pdf Committee Members: Christopher Rahn, Thesis Advisor/Co-AdvisorChristopher Rahn, Thesis Advisor/Co-AdvisorSrinivas A Tadigadapa, Thesis Advisor/Co-AdvisorDonghai Wang, Thesis Advisor/Co-Advisor
