1. DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS Open Access Author: Zhang, Zheqian Title: DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS Graduate Program: Mechanical Engineering Keywords: multifunctional transducersPZTpiezoelectricMEMS File: Download DESIGN_FABRICATION_AND_CHARACTERIZATION_OF_MICROMACHINED_PIEZOELECTRIC_T-BEAM_TRANSDUCERS.pdf Committee Members: Christopher Rahn, Thesis Advisor/Co-AdvisorChristopher Rahn, Thesis Advisor/Co-AdvisorSrinivas A Tadigadapa, Thesis Advisor/Co-AdvisorDonghai Wang, Thesis Advisor/Co-Advisor
