Search

Author:

Cheong, Jongpil

Title:

DESIGN, FABRICATION, MODELING, AND EXPERIMENTAL TESTING OF A PIEZOELECTRIC FLEXTENSIONAL MICROACTUATOR

Graduate Program:

Mechanical Engineering

Keywords:

Buckling
PZT
beam
flextensional
microactuator

File:

Download Ph.D._Thesis_Jongpil_Cheong_ME.pdf

Committee Members:

Christopher Rahn, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Eric M Mockensturm, Committee Member
Md Amanul Haque, Committee Member

Author:

Gross, Steven Joseph

Title:

MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)

Graduate Program:

Electrical Engineering

Keywords:

MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph

File:

Download SJG-Thesis.pdf

Committee Members:

Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member

Author:

Zhang, Zheqian

Title:

DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS

Graduate Program:

Mechanical Engineering

Keywords:

multifunctional transducers
PZT
piezoelectric
MEMS

File:

Download DESIGN_FABRICATION_AND_CHARACTERIZATION_OF_MICROMACHINED_PIEZOELECTRIC_T-BEAM_TRANSDUCERS.pdf

Committee Members:

Christopher Rahn, Thesis Advisor/Co-Advisor
Christopher Rahn, Thesis Advisor/Co-Advisor
Srinivas A Tadigadapa, Thesis Advisor/Co-Advisor
Donghai Wang, Thesis Advisor/Co-Advisor