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Keyword
- microbolometer2
- vanadium oxide2
- 1/f Noise1
- High TCR1
- Hydrogenated Germanium1
- Infrared Imaging1
- Microbolometer1
- Pulsed dc sputtering1
- Vanadium oxide1
- annealing1
- infrared imaging1
- ion implantation1
- magnetron sputtering1
- molybdenum oxide1
- nickel oxide1
- reactive sputtering deposition1
- spectroscopic ellipsometry1
- thin film deposition1
- thin films1
- uncooled infrared imaging1