Thermal Sensing Using Micromachined Y-cut Quartz Resonators

Open Access
Patwardhan, Ashish Anil
Graduate Program:
Electrical Engineering
Master of Science
Document Type:
Master Thesis
Date of Defense:
July 18, 2008
Committee Members:
  • Srinivas A Tadigadapa, Thesis Advisor
  • micromachined
  • thermal sensing
  • QCM
  • resonators
  • Quartz
  • mems
In this thesis, a process for the fabrication of miniature Y-cut Quartz resonators is presented. The fabricated Y-cut resonators were characterized and their resonance characteristics were compared to theory. Y-cut quartz resonators are temperature sensitive (90ppm/K).This property of these resonators enables us to use these sensors as a thermal sensor. This sensor is ideal to monitor small quantities of heat generated as in enzymatic reactions or as an Infrared sensor. A method for the measurement of infrared radiation using the Y-cut resonators is presented in this thesis. A circuit is proposed for the real time frequency monitoring of the resonator. This circuit will be able to record the smallest change in frequency in real time, thus aiding in the analysis of the process under study.