Hybrid Integration of Nanowire Resonator Arrays
Open Access
- Author:
- Li, Mingwei
- Graduate Program:
- Electrical Engineering
- Degree:
- Doctor of Philosophy
- Document Type:
- Dissertation
- Date of Defense:
- July 06, 2007
- Committee Members:
- Theresa Stellwag Mayer, Committee Chair/Co-Chair
Thomas Nelson Jackson, Committee Member
Christine Dolan Keating, Committee Member
Graig A Grimes, Committee Member - Keywords:
- nanowire
assembly
fabrication
resonator - Abstract:
- This thesis describes the development and demonstration of a hybrid integration method in an approach to nanofabrication that enables fabrication of nanomechanical resonator arrays using nanowires. This integration method combines techniques in off chip synthesis and on chip assembly of nanowire materials. Involving the electric-field assisted nanowire arrays assembly, photolithographic patterning, and electrodeposition, this method enables the parallel placement and secure clamping of individual nanowires on a pre-patterned substrate to create nanoresonator arrays. Resonance performance of nanowire resonator made from silicon, rhodium, and gold has been investigated, allowing the studies of the repeatability of this new clamping method, energy dissipation and elastic properties of materials in nanoscale. Significantly, this method has been used to integrate multiplexed derivatized (e.g. peptide nucleic acid) nanowires into parallel resonator arrays, while retaining the functions of the biomolecules. This will facilitate the development of chip-based multiple-target biosensor arrays using nanowire resonators. This integration method is general and capable for a variety of off-chip synthesized materials, which will extend the scope of resonator application and enable functional nanowire systems.