Zinc Oxide Thin-Film Devices for Space Exploration
Open Access
Author:
Tendulkar, Mohit Milind
Graduate Program:
Electrical Engineering (PHD)
Degree:
Doctor of Philosophy
Document Type:
Dissertation
Date of Defense:
June 09, 2022
Committee Members:
Susan Trolier-McKinstry, Outside Unit & Field Member Tom Jackson, Chair & Dissertation Advisor Rongming Chu, Major Field Member Mehdi Kiani, Major Field Member Kultegin Aydin, Program Head/Chair
ZnO based thin-film devices were investigated for use in space exploration observatories. A curved substrate aligner and a PEALD system were developed to facilitate fabrication of ZnO thin-film transistors (TFTs) with piezoelectric actuators to form adjustable x-ray optics. High yield for TFTs was obtained by modifying fabrication process and TFT layout. A new trilayer lift-off process for patterning metals was also developed. ZnO thin-film based strain and temperature sensors were investigated for integration on adjustable x-ray optics.
