ZnO based thin-film devices were investigated for use in space exploration observatories. A curved substrate aligner and a PEALD system were developed to facilitate fabrication of ZnO thin-film transistors (TFTs) with piezoelectric actuators to form adjustable x-ray optics. High yield for TFTs was obtained by modifying fabrication process and TFT layout. A new trilayer lift-off process for patterning metals was also developed. ZnO thin-film based strain and temperature sensors were investigated for integration on adjustable x-ray optics.