Design and Nanofabrication of Active and Multilayer Metaphotonic Devices

Open Access
- Author:
- Duan, Yao
- Graduate Program:
- Electrical Engineering
- Degree:
- Doctor of Philosophy
- Document Type:
- Dissertation
- Date of Defense:
- October 05, 2021
- Committee Members:
- Zhiwen Liu, Major Field Member
Mikael Rechtsman, Minor Field Member
Xin Ning, Outside Unit & Field Member
Xingjie Ni, Chair & Dissertation Advisor
Noel Giebink, Major Field Member
Kultegin Aydin, Program Head/Chair - Keywords:
- Metaphotonics
Anti-Parity-Time Symmetry
Moiré Metasurfaces
Achromatic Metalens
Neural Networks
Integrated Metasurfaces - Abstract:
- Metaphotonics is one branch of modern optics which focuses on manipulating light with subwavelength nanostructures. Since emergence from early 2000, it has greatly expanded the functionalities of traditional optical elements as well as kept good compatibility with current semiconductor manufacturing technology. After 20 years research, metaphotonic structures have developed from bulky plasmonic metamaterials into flat dielectric metasurfaces. The increasing integration density and reduced optical loss pave the solid foundation for widespread application of metaphotonics devices. However, there still remain two main problems. First, instead of realizing one function at single wavelength, the metasurfaces are preferred to be tunable with more functions or wider bandwidth and comparable with existing commercial optical elements. Second, hybridization between metasurfaces and other microstructures can be further explored to outperform the single metasurface layer. In this dissertation, both questions are addressed for applications in near infrared or visible regime. An active bi-color laser with tuning capability in frequency domain and a passive doublet metasurfaces with tuning capability in spatial domain are first discussed to show how the functions of metaphotonic devices can be dynamically manipulated based on versatile interdisciplinary concepts. Then the hybridization between metasurfaces and microstructures are investigated for achromatic metalens and on-chip light manipulation respectively. Specifically, deep learning techniques are introduced to improve the design flow and performance of metaphotonic device. At last, the key steps of nanofabrication process for metaphotonic devices are explored and explained in detail to provide references for realizing them in practice.