1. NANO-LEVEL CHARACTERIZATION OF THE SURFACE PROPERTIES OF ENGINEERED SILICON WAFER Open Access Author: Xi, Xiaoning Title: NANO-LEVEL CHARACTERIZATION OF THE SURFACE PROPERTIES OF ENGINEERED SILICON WAFER Graduate Program: Engineering Mechanics Keywords: direct bondingwetting propertiessurface roughnessatomic force microscopy File: Download xiaoningthesis.pdf Committee Members: Bernhard R Tittmann, Thesis Advisor/Co-AdvisorBernhard R Tittmann, Thesis Advisor/Co-Advisor
