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Author:

Molina, Alex

Title:

Semiconductor Surface Passivation and Metallization for Schottky Diodes

Graduate Program:

Materials Science and Engineering

Keywords:

Schottky diodes
contacts
transition metals
semiconductor structures
gallium nitride
rhenium
molybdenum carbonitride
atomic layer deposition
energy dispersive x-ray spectroscopy
transmission electron microscopy
x-ray diffraction
hydrobromic acid
x-ray photoelectron spectroscopy
electron beam evaporation
sputtering
surface passivation
metallization

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Committee Members:

Michael Lanagan, Outside Unit & Field Member
Rongming Chu, Outside Field Member
Jon-Paul Maria, Major Field Member
Suzanne Mohney, Chair & Dissertation Advisor
John Mauro, Program Head/Chair