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Author:: Hong, Eunki
Title:: Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film
Graduate Program:: Materials Science and Engineering
Keywords:: surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT
File:: Download etd.pdf
Committee Members:: Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member

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