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Author:

Tremper, Amber Leigh

Title:

Effects of Nanoscale Coatings on Reliability of MEMS Ohmic Contact Switches

Graduate Program:

Materials Science and Engineering

Keywords:

MEMS
ohmic
thin films
nanoindentation
coatings
ruthenium
gold
platinum
contact resistance

File:

Download Tremper_Doctoral_Thesis_final.pdf

Committee Members:

Suzanne E Mohney, Dissertation Advisor/Co-Advisor
Dr Christopher Muhlstein, Dissertation Advisor/Co-Advisor
Paul Raymond Howell, Committee Member
Seong Han Kim, Committee Member
Albert Eliot Segall, Committee Member