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Author:

Larrabee, Thomas James

Title:

A Quantified Dosing ALD Reactor with In-situ Diagnostics for Surface Chemistry Studies

Graduate Program:

Chemistry

Keywords:

atomic layer deposition
quartz crystal microbalance
quadrupole mass spectrometer
in-situ diagnostics
adsorption
reactivity

File:

Download Larrabee_to_upload.pdf

Committee Members:

David Lawrence Allara, Dissertation Advisor/Co-Advisor
Thomas E Mallouk, Dissertation Advisor/Co-Advisor
Miriam Arak Freedman, Committee Member
Roman Engel Herbert, Committee Member