Keyword: plasma-enhanced atomic layer deposition

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Author:: Zhao, Dalong
Title:: PLASMA-ENHANCED ATOMIC LAYER DEPOSITION ZINC OIXDE FLEXIBLE THIN FILM ELECTRONICS
Graduate Program:: Electrical Engineering
Keywords:: Oxide semiconductor
plasma-enhanced atomic layer deposition
thin film transistor
flexible electronics
File:: Download Thesis-final-ETD.pdf
Committee Members:: Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Member
Suman Datta, Committee Member
Mark William Horn, Committee Member

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