1. Experimental and Computational Investigations of Platinum and Gallium Nitride Vapor Deposition Processes Restricted (Penn State Only) Author: Campbell, Ian Title: Experimental and Computational Investigations of Platinum and Gallium Nitride Vapor Deposition Processes Graduate Program: Materials Science and Engineering Keywords: atomic layer depositionchemical vapor depositionplatinumgallium nitridedensity functional theorymesoporous nitrogen doped carbonnucleiparticlethin film File: Login to Download Committee Members: Suzanne Mohney, Chair & Dissertation AdvisorSusan Sinnott, Major Field MemberFeifei Shi, Outside Unit & Field MemberJoan Redwing, Major Field MemberJohn Mauro, Program Head/Chair