Search

Author:

Hong, Eunki

Title:

Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

Graduate Program:

Materials Science and Engineering

Keywords:

surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT

File:

Download etd.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member