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Author:

St John, David Benjamin

Title:

Optical and Electrical Characterization of High Resistivity Semiconductors for Constant-bias Microbolometer Devices

Graduate Program:

Materials Science and Engineering

Keywords:

PECVD
silicon
germanium
infrared
ellipsometry
spectroscopic ellipsometry
infrared ellipsometry
microbolometer

File:

Download Dissertation_Final.pdf

Committee Members:

Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Mark William Horn, Committee Member
Noel Christopher Giebink, Committee Member
Jeffrey Brownson, Committee Member
Christopher Roman Wronski, Committee Member
Nikolas J Podraza, Special Member